Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods1 Scope This Technical Report describes: a) Functions and their relevance to lateral resolution: 1) Point spread function (PSF) see 4. 1. 1 2) Line spread function (LSF) see 4. 1. 2 3) Edge spread function (ESF) see 4. 1. 3 4) Modulation transfer function (MTF) see 4. 1. 4 5) Contrast transfer function (CTF) see 4. 1. 5. b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution: 1) Imaging of a

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